Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/08/1994
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Application #:
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08178933
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Filing Dt:
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01/07/1994
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Inventors:
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ROBIN A. GARDINER, PETER VAN BUSKIRK, PETER S. KIRLIN
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Title:
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APPARATUS AND METHOD FOR DELIVERING REAGENTS IN VAPOR FORM TO A CVD REACTOR, INCORPORATING A CLEANING SUBSYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7 COMMERCE DRIVE |
DANBURY, CONNECTICUT 06810 |
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JANET ELLIOTT |
7 COMMERCE DRIVE |
DANBURY, CT 06810 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129 CONCORD ROAD |
BILLERICA, MASSACHUSETTS 01821 |
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HULTQUIST IP |
PO BOX 14329 |
RESEARCH TRIANGLE PK, NC 27709 |
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