Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/1995
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Application #:
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08173390
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Filing Dt:
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12/23/1993
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Inventors:
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STEVEN G. BARBEE, TONY F. HEINZ, RICHARD J. LEBEL, LEPING LI, VICTOR J. SILVESTRI
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Title:
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METHOD AND APPARATUS FOR REAL-TIME FILM SURFACE DETECTION FOR LARGE AREA WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| MICHAEL J. BALCONI-LAMICA |
| IBM CORPORATION |
| INTELLECTUAL PROPERTY LAW DEPT. |
| DEPT. 34H/BLDG. 300-482, 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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