Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/1995
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Application #:
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08010051
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Filing Dt:
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01/28/1993
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Inventors:
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YUTAKA KAKEHI, YOSHINAO KAWASAKI, KEIZO SUZUKI, KAZUO NOJIRI, HIROMICHI ENAMI et al
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Title:
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METHODS AND APPARATUS FOR GENERATING PLASMA, AND SEMICONDUCTOR PROCESSING METHODS USING MODE RESTRICTED MICROWAVES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI, 4-CHOME, CHIYODA-KU |
| TOKYO 101, JAPAN |
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| MELVIN KRAUS |
| ANTONELLI, TERRY, STOUT & KRAUS |
| 1300 NORTH SEVENTEENTH STREET, STE. 1800 |
| ARLINGTON, VA 22209 |
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