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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	5441076	Issue Dt:	08/15/1995	Application #:	08222589	Filing Dt:	04/04/1994
Inventors:	SHUJI MORIYA, TAKENOBU MATSUO, TSUYOSHI WAKABAYASHI, KAZUTOSHI MIURA, TAKAHIRO MORI
Title:	PROCESSING APPARATUS USING GAS

Assignment: 1

Reel/Frame:

006947/0862

Recorded: 04/04/1994

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

MORIYA, SHUJI

Exec Dt:

03/31/1994

MATSUO, TAKENOBU

Exec Dt:

03/31/1994

WAKABAYASHI, TSUYOSHI

Exec Dt:

03/31/1994

MIURA, KAZUTOSHI

Exec Dt:

03/31/1994

MORI, TAKAHIRO

Exec Dt:

03/31/1994

Assignees:

TOKYO ELECTRON LIMITED

2-3-1, NISHI-SHINJUKU

SHINJUKU-KU,

TOKYO, JAPAN

TOKYO ELECTRON TOHOKU LIMITED

52 AZAMATSUNAGANE, IWAYADO

ESASHI-SHI,

IWATE-KEN, JAPAN

Correspondent:

OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT

MARVIN J. SPIVAK

1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR

ARLINGTON, VA 22202

Assignment: 2

Reel/Frame:

008595/0021

Recorded: 07/11/1997

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

TOKYO ELECTRON TOHOKU LIMITED

Exec Dt:

11/27/1996

Assignee:

TOKYO ELECTRON LIMITED

MINATO-KU

3-6 AKASAKA 5-CHOME

TOKYO 105, JAPAN

Correspondent:

OBLON, SPIVAK, MCCLELLAND, ET AL.

MARVIN J. SPIVAK

1755 JEFFERSON DAVIS HWY., 4TH FLOOR

ARLINGTON, VA 22202

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