Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08213087
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Filing Dt:
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03/15/1994
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Inventor:
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OSAMU OZAWA
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Title:
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GAS EXHAUST SYSTEM AND PUMP CLEANING SYSTEM FOR A SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 32-3, KOENJI-MINAMI 1-CHOME SUGINAMI-KU |
| TOKYO 166, JAPAN |
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| WILLIAM C. ROWLAND |
| BURNS, DOANE, SWECKER & MATHIS |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VIRGINIA 22313-1404 |
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