Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/12/1995
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Application #:
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08141803
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Filing Dt:
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10/25/1993
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Inventor:
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HIROJI HANAWA
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Title:
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METHOD OF TREATING A WORKPIECE WITH A PLASMA AND PROCESSING REACTOR HAVING PLASMA IGNITER AND INDUCTIVE COUPLER FOR SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVE. |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATENT COUNSEL - MAIL STOP #0934 |
| APPLIED MATERIALS, INC. |
| 3050 BOWERS AVE. |
| SANTA CLARA, CA 95054 |
| ATTN: CHARLES S. GUENZER |
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