Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/17/1995
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Application #:
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08154078
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Filing Dt:
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11/18/1993
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Inventors:
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HIROYUKI SHICHIDA, NAOYUKI TAMURA, AKITAKA MAKINO
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Title:
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METHOD OF AND APPARATUS FOR SECURING AND COOLING/HEATING A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU, TOKYO JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS |
| GREGORY E. MONTONE |
| 1300 N. SEVENTEENTH STREET |
| SUITE 1800 |
| ALINGTON, VA 22209 |
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