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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
5470421
Issue Dt:
11/28/1995
Application #:
08305334
Filing Dt:
09/15/1994
Inventors:
AKIRA NAKADA, AKIRA YONEYA, NORIYUKI KOBAYASHI, MAMORU KATAYANAGI, TSUTOMU KAWASHIMA et al
Title:
METHOD FOR PURIFICATION OF ETCHING SOLUTION
Assignment: 1
Reel/Frame:
007241/0982Recorded: 12/12/1994Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NAKADA, AKIRA
Exec Dt:
08/30/1994
YONEYA, AKIRA
Exec Dt:
08/30/1994
KOBAYASHI, NORIYUKI
Exec Dt:
08/30/1994
KATAYANAGI, MAMORU
Exec Dt:
08/30/1994
KAWASHIMA, TSUTOMU
Exec Dt:
08/30/1994
YOSHIDA, HIROSHI
Exec Dt:
08/30/1994
Assignee:
NISSO ENGINEERING CO., LTD.
6-1, 1-CHOME, KANDA JINBOCHO, CHIYODA-KU
TOKYO, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER
& NEUSTADT, P.C. - NORMAN F. OBLON
1755 JEFFERSON DAVIS HWY., FOURTH FLOOR
ARLINGTON, VIRGINIA 22202
Assignment: 2
Reel/Frame:
015147/0751Recorded: 03/29/2004Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
NISSO ENGINEERING CO., LTD.
Exec Dt:
02/06/2004
Assignee:
M ' FSI LTD.
32-2, HONCHO 1-CHOME
NAKANO-KU, TOKYO, JAPAN
Correspondent:
SUGHRUE MION, PLLC
DAVID J. CUSHING
2100 PENNSYLVANIA AVENUE, N.W.
SUITE 800
WASHINGTON, DC 20037

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