Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/02/1996
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Application #:
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08269860
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Filing Dt:
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06/30/1994
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Inventors:
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STEVEN G. BARBEE, TONY F. HEINZ, LEPING LI, EUGENE H. RATZLAFF
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Title:
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METHOD FOR CONTACTLESS REAL-TIME IN SITU MONITORING OF A CHEMICAL ETCHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION |
| DEPT. 34H/BLDG. 300-482 |
| 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
| MICHAEL J. BALCONI-LAMICA |
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