Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/06/1996
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Application #:
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08211472
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Filing Dt:
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08/29/1994
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Inventors:
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HEINZ STEINHARDT, JOSEF MATHUNI
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Title:
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METHOD FOR GENERATING EXCITED NEUTRAL PARTICLES FOR ETCHING AND DEPOSITION PROCESSES IN SEMICONDUCTOR TECHNOLOGY WITH A PLASMA DISCHARGE FED BY MICROWAVE ENERGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AM KANAL 111 A-1110 WIEN GERMANY |
| WIEN, GERMANY |
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| MELVIN A. ROBINSON |
| HILL, STEADMAN & SIMPSON P.C. |
| 85TH FLOOR SEARS TOWER |
| 233 S. WACKER DRIVE |
| CHICAGO, IL 60606 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LIECHTENSTEINSTRASSE 18 |
| A2344 MA.ENZERSDORF, AUSTRIA |
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| SCHIFF HARDIN & WAITE |
| JOHN D. SIMPSON |
| PATENT DEPARTMENT |
| 233 S. WACKER DRIVE, 6600 SEARS TOWER |
| CHICAGO, IL 60606-6473 |
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