Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
07/16/1996
|
Application #:
|
08309409
|
Filing Dt:
|
09/20/1994
|
|
Inventors:
|
HIROKI KAWADA, KAZUE TAKAHASHI, MANABU EDAMURA, SABURO KANAI, NAOYUKI TAMURA
|
|
Title:
|
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS METHOD WITH OPTICAL MONITORING OF STATE OF PROCESSING CHAMBER
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
|
|
|
|
| ANTONELLI, TERRY, STOUT & KRAUS |
| MELVIN KRAUS |
| 1300 N. 17TH ST., |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
|
|
Search Results as of:
04/26/2024 01:26 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
