Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/1996
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Application #:
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08437606
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Filing Dt:
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05/09/1995
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Inventors:
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KOICHI FUKUDA, TOMOFUMI OBA, MASANORI MIYAZAKI, HIROFUMI FUKUI, CHISATO IWASAKI et al
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Title:
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METHOD OF SPUTTERING A SILICON NITRIDE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OTA-KU |
| 1-7, YUKIGAYA, OTSUKA-CHO |
| TOKYO, JAPAN |
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| BRINKS HOFER ET AL |
| GUSTAVO SILLER, JR |
| PO BOX 10395 |
| CHICAGO, IL 60610 |
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