Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/1996
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Application #:
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08231760
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Filing Dt:
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04/25/1994
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Inventor:
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MASAHARU NAKAMURA
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Title:
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SEMICONDUCTOR MANUFACTURING SYSTEM WITH SELF-DIAGNOSING FUNCTION AND SELF-DIAGNOSING METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1, SHIMORENJAKU 9-CHOME MITAKA-SHI |
| TOKYO, JAPAN |
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| OLIFF & BERRIDGE |
| JAMES A. OLIFF |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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