Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/29/1996
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Application #:
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08364227
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Filing Dt:
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12/27/1994
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Inventors:
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MOTOSUKE MIYOSHI, KATSUYA OKUMURA
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Title:
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METHOD AND APPARATUS FOR REPAIRING DEFECT ON PLANE SURFACE OF PHASE SHIFT MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KAWASAKI-SHI |
| 72, HORIKAWA-CHO, SAIWAI-KU |
| KANAGAWA-KEN, JAPAN |
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| ROBERT F. GNUSE |
| OBLON, SPIVAK, MCCLELLAND ET AL. |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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