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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	5578821	Issue Dt:	11/26/1996	Application #:	08371458	Filing Dt:	01/11/1995
Inventors:	DAN MEISBURGER, ALAN D. BRODIE, ANIL A. DESAI, DENNIS G. EMGE, ZHONG-WEI CHEN et al
Title:	ELECTRON BEAM INSPECTION SYSTEM AND METHOD

Assignment: 1

Reel/Frame:

007559/0165

Recorded: 07/28/1995

Pages: 15

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

MEISBERGER, DAN

Exec Dt:

05/26/1995

BRODIE, ALAN D.

Exec Dt:

06/07/1995

DESAI, ANIL A.

Exec Dt:

03/13/1995

EMGE, DENNIS G.

Exec Dt:

03/27/1995

CHEN, ZHONG-WEI

Exec Dt:

06/07/1995

SIMMONS, RICHARD

Exec Dt:

06/07/1995

SMITH, DAVE E.A.

Exec Dt:

03/10/1995

DUTTA, APRIL

Exec Dt:

03/13/1995

ROUGH, J. KIRKWOOD H.

Exec Dt:

07/10/1995

HONFI, LESLIE A.

Exec Dt:

06/29/1995

PEARCE-PERCY, HENRY

Exec Dt:

03/08/1995

MCMURTRY, JOHN

Exec Dt:

03/27/1995

MUNRO, ERIC

Exec Dt:

07/20/1995

Assignee:

KLA INSTRUMENTS CORPORATION

160 RIO ROBLES STREET

SAN JOSE, CALIFORNIA 95161

Correspondent:

PHILLIPS, MOORE, LEMPIO & FINLEY

ALLSTON L. JONES

385 SHERMAN AVENUE, SUITE 6

PALO ALTO, CA 94306-1840

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