Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/1996
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Application #:
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08269414
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Filing Dt:
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06/30/1994
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Inventors:
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AJIT P. PARANJPE, CECIL J. DAVIS, ROBERT T. MATTHEWS
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Title:
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STRUCTURE AND METHOD FOR INCORPORATING AN INDUCTIVELY COUPLED PLASMA SOURCE IN A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| POST OFFICE BOX 655474 M/S 219 |
| DALLAS, TEXAS 75265 |
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| JACQUELINE J. GAMER |
| TEXAS INSTRUMENTS INCORPORATED |
| POST OFFICE BOX 655474, M/S 219 |
| DALLAS, TEXAS 75265 |
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