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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
5581075
Issue Dt:
12/03/1996
Application #:
08446509
Filing Dt:
05/22/1995
Inventors:
TSUYOSHI NARAKI, MASAMITSU YANAGIHARA, HIROSHI SHIRASU, TOMOHIDE HAMADA, TETSUO KIKUCHI et al
Title:
MULTI-BEAM SCANNING PROJECTION EXPOSURE APPARATUS AND METHOD WITH BEAM MONITORING AND CONTROL FOR UNIFORM EXPOSURE OF LARGE AREA SUBSTRATES
Assignment: 1
Reel/Frame:
007531/0259Recorded: 05/22/1995Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NARAKI, TSUYOSHI
Exec Dt:
05/15/1995
SHIRASU, HIROSHI
Exec Dt:
05/15/1995
KIKUCHI, TETSUO
Exec Dt:
05/15/1995
YANAGIHARA, MASAMITSU
Exec Dt:
05/15/1995
HAMADA, TOMOHIDE
Exec Dt:
05/15/1995
YAMAMOTO, NORIAKI
Exec Dt:
05/15/1995
Assignee:
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME CHIYODA-KU
TOKYO 100, JAPAN
Correspondent:
SHAPIRO AND SHAPIRO
NELSON H. SHAPIRO
1100 WILSON BOULEVARD, SUITE 1701
ARLINGTON, VIRGINIA 22209

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