Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/21/1997
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Application #:
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08522686
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Filing Dt:
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09/01/1995
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Inventors:
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KEITH A. KLINEDINST, JOSEPH E. LESTER
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Title:
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APPARATUS FOR THE CONTROLLED DELIVERY OF VAPORIZED CHEMICAL PRECURSOR TO AN LPCVD REACTOR
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 100 ENDICOTT ST. |
| DANVERS, MASSACHUSETTS 01923 |
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| OSRAM SYLVANIA INC. |
| 100 ENDICOTT ST. |
| PATENT DEPARTMENT |
| DANVERS, MA 01923 |
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