Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08517594
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Filing Dt:
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08/22/1995
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Inventors:
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JOERN DIERKS, JUERGEN MAIER
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Title:
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MERCURY-VAPOR HIGH-PRESSURE SHORT-ARC DISCHARGE LAMP, AND METHOD AND APPARATUS FOR EXPOSURE OF SEMICONDUCTOR WAFERS TO RADIATION EMITTED FROM SAID LAMP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HELLABRUNNER STRASSE 1 |
| D-81543 MUNICH, GERMANY |
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| FRISHAUF, HOLTZ, GOODMAN, LANGER ET AL |
| STEPHEN H. FRISHAUF |
| 767 THIRD AVENUE, 25TH FLOOR |
| NEW YORK, NY 10017-2023 |
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