Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/25/1997
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Application #:
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08409388
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Filing Dt:
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03/23/1995
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Inventor:
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HIROJI HANAWA
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Title:
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PROCESS AND APPARATUS FOR ETCHING METAL IN INTEGRATED CIRCUIT STRUCTURE WITH HIGH SELECTIVITY TO PHOTORESIST AND GOOD METAL ETCH RESIDUE REMOVAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| 3050 BOWERS AVENUE, M/S #2634 |
| SANTA CLARA, CALIFORNIA 95054 |
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| PETERT J. SGARBOSSA |
| APPLIED MATERIALS, INC. |
| LEGAL AFFAIRS DEPT. |
| 3050 BOWERS AVE., M/S 2634 |
| SANTA CLARA, CA 95054 |
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