Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/22/1997
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Application #:
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08435063
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Filing Dt:
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05/08/1995
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Inventors:
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MICHAEL D. ARMACOST, DAVID DOBUZINSKY, JEFFREY GAMBINO, SON NGUYEN
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Title:
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HIGH DENSITY SELECTIVE SIO2:SI3N4 ETCHING USING A STOICHIOMETRICALLY ALTERED NITRIDE ETCH STOP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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OLD ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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WHITHAM, CURTIS, ET AL |
ATTN: C. LAMONT WHITHAM |
RESTON INTERNATIONAL CENTER |
11800 SUNRISE VALLEY DRIVE, SUITE 900 |
RESTON, VA 22091 |
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