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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
5637153
Issue Dt:
06/10/1997
Application #:
08429159
Filing Dt:
04/26/1995
Inventors:
REIJI NIINO, YOSHIYUKI FUJITA, HIDEKI LEE, YASUO IMAMURA, TOSHIHARU NISHIMURA et al
Title:
METHOD OF CLEANING REACTION TUBE AND EXHAUSTION PIPING SYSTEM IN HEAT PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
007545/0802Recorded: 07/06/1995Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NIINO, REIJI
Exec Dt:
05/16/1995
LEE, HIDEKI
Exec Dt:
05/25/1995
NISHIMURA, TOSHIHARU
Exec Dt:
05/25/1995
MIYAZAKI, SHINJI
Exec Dt:
04/25/1995
OKUMURA, KATSUYA
Exec Dt:
05/09/1995
FUJITA, YOSHIYUKI
Exec Dt:
05/25/1995
IMAMURA, YASUO
Exec Dt:
05/25/1995
MIKATA, YUUICHI
Exec Dt:
04/25/1995
MORIYA, TAKAHIKO
Exec Dt:
04/25/1995
KATO, HITOSHI
Exec Dt:
05/25/1995
Assignee:
TOKYO ELECTRON LIMITED
MINATO-KU
3-6 AKASAKA 5-CHOME
TOKYO 107, JAPAN
Correspondent:
JOHN J. GOOLKASIAN
OBLON, SPIVAK, MCCLELLAND ET AL.
FOURTH FLOOR
1755 JEFFERSON DAVIS HIGHWAY
ARLINGTON, VIRGINIA 22202

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