Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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07/22/1997
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Application #:
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08450307
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Filing Dt:
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05/25/1995
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Inventors:
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KAZUTOSHI KAJI, SHUEH L. YAU, KINGO ITAYA, TOSHIHIKO SAKUHARA
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Title:
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ETCHING METHOD USING NH4F SOLUTION TO MAKE SURFACE OF SILICON SMOOTH IN ATOMIC ORDER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-8 HON-CHO, 4-CHOME, KAWAGUCHI-SHI |
| SAITAMA-KEN, JAPAN 332 |
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| 1-9-16 YAGIYAMA-MINAMI TAIHAKU-KU, SENDAI-SHI |
| MIYAGI-KEN, JAPAN 982 |
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| 2-18-13 YAGIYAMA-HIGASHI, TAIHAKU-KU, SENDAI-SHI |
| MIYAGI-KEN, JAPAN 932 |
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| RUSSELL D. ORKIN |
| WEBB, ZIESENHEIM, BRUENING, ET AL. |
| 700 KOPPERS BUILDING |
| 436 SEVENTH AVENUE |
| PITTSBURGH, PA 15219 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8 NAKASE 1-CHOME, MIHAMA-KU, CHIBASHI |
| CHIBA-KEN, 261-8507, JAPAN |
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| WEBB ZIESENHEIM BRUENING |
| RUSSELL D. ORKIN |
| 700 KOPPERS BUILDING |
| 436 SEVENTH AVENUE |
| PITTSBURGH, PA 15219-1818 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 6 KANDA-SURUGADAI 4-CHOME |
| TOKYO 101-0062, JAPAN |
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| WEBB ZIESENHEIM BRUENING, ET AL. |
| RUSSELL D. ORKIN |
| 700 KOPPERS BUILDING |
| 436 SEVENTH AVENUE |
| PITTSBURGH, PA 15219-1818 |
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