Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/19/1997
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Application #:
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08563172
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Filing Dt:
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11/27/1995
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Inventors:
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DAVID ANGELL, PAUL BAO-LUO CHOU, ANTONIO R. LEE, MARTIN C. STURZENBECKER
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Title:
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MONITORING AND CONTROLLING PLASMA PROCESSES VIA OPTICAL EMISSION USING PRINCIPLE COMPONENT ANALYSIS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION |
| H. DANIEL SCHNURMANN |
| 1580 ROUTE 52 |
| DEPT 18G/BLDG. 300-482 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION |
| H. DANIEL SCHNURMANN |
| INTELLECTUAL PROPERTY LAW DEPT. |
| DEPT. 18G, BLDG., 300-482, 1580 RT. 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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