Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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09/02/1997
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Application #:
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08048991
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Filing Dt:
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04/16/1993
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Inventor:
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KEVIN G. DONOHOE
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Title:
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METHOD AND APPARATUS FOR IMPROVING ETCH UNIFORMITY IN REMOTE SOURCE PLASMA REACTORS WITH POWERED WAFER CHUCKS.
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2805 E. COLUMBIA ROAD |
| BOISE, IDAHO 83706 |
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| ANGUS C. FOX, III |
| MICRON SEMICONDUCTOR, INC. |
| 2805 E. COLUMBIA ROAD |
| BOISE, ID 83706 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2805 EAST COLUMBIA ROAD |
| MAIL STOP 507, PATENT DEPARTMENT |
| BOISE, IDAHO 83706 |
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| TERRIL G. LEWIS |
| 20333 SH 249 SUITE 600 |
| HOUSTON, TX 77070 |
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Assignment:
3
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 8000 S. FEDERAL WAY |
| BOISE, IDAHO 83706 |
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| MICRON TECHNOLOGY, INC. |
| WALTER D. FIELDS |
| 8000 S. FEDERAL WAY |
| PATENT DEPT., MAIL STOP 525 |
| BOISE, IDAHO 83706-9632 |
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Assignment:
4
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 8000 S. FEDERAL WAY |
| BOISE, IDAHO 83706 |
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| TERRIL G. LEWIS |
| 20333 SH 249 SUITE 600 |
| HOUSTON, TX 77070 |
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