Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/02/1997
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Application #:
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08559050
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Filing Dt:
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01/18/1996
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Inventors:
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LAP CHAN, SIMON CHOOI
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Title:
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ELECTRICAL TEST STRUCTURE TO QUANTIFY MICROLOADING AFTER PLASMA DRY ETCHING OF METAL FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SINGAPORE SCIENCE PARK |
NO. 2 SCIENCE PARK DRIVE |
SINGAPORE, SINGAPORE |
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GEORGE O. SAILE |
20 MCINTOSH DR. |
POUGHKEEPSIE, NY 12603 |
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