Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/27/1998
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Application #:
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08761169
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Filing Dt:
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12/06/1996
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Inventors:
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VINCENT JAMES MCGAHAY, JAMES GARDNER RYAN, MICHAEL JAY SHAPIRO et al
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Title:
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METHOD AND APPARATUS FOR DETERMINING CHAMBER CLEANING END POINT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| EAST FISHKILL FACILITY |
| 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NEW YORK 12533 |
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| IBM CORPORATION |
| SUSAN M. MURRAY |
| EAST FISHKILL FACILITY |
| 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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