Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/24/1998
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Application #:
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08605823
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Filing Dt:
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02/23/1996
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Inventors:
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ROBERT STEGER, JAMES TAOKA, GREGORY SHMUNIS
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Title:
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APPARATUS AND METHOD FOR TRANSFERRING HEAT FROM A HOT ELECTROSTATIC CHUCK TO AN UNDERLYING COLD BODY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| MICHAEL B. EINSCHLAG |
| LEGAL AFFAIRS DEPT., PATENT COUNSEL |
| 3050 BOWERS AVE. M/S 2061 |
| SANTA CLARA, CA 95054 |
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