Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/05/1998
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Application #:
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08392196
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Filing Dt:
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02/22/1995
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Inventors:
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YASUHIKO NAKAYAMA, MASATAKA SHIBA, SUSUMU KOMORIYA
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Title:
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CONTROLLING METHOD OF FORMING THIN FILM, SYSTEM FOR SAID CONTROLLING METHOD, EXPOSURE METHOD AND SYSTEM FOR SAID EXPOSURE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU` |
| TOKYO, JAPAN |
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| FAY, SHARPE, BEALL, FAGAN, ET AL |
| RICHARD J. MINNICH, ESQ. |
| 1100 SUPERIOR AVENUE, STE. 700 |
| CLEVELAND, OH 44114-2518 |
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