Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/21/1998
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Application #:
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08307870
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Filing Dt:
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09/16/1994
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Inventors:
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DIANA X. MA, GERALD Z. YIN, HIROJI HANAWA
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Title:
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HIGH ETCH RATE RESIDUE FREE METAL ETCH PROCESS WITH LOW FREQUENCY HIGH POWER INDUCTIVE COUPLED PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AV |
| LEGAL AFFAIRS DEPARTMENT-M/S #0934 |
| SANTA CLARA, CALIFORNIA 95054 |
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| PETER J. SGARBOSSA |
| APPLIED MATERIALS, INC. |
| LEGAL AFFAIRS DEPT. |
| 3050 BOWERS AVE. M/S 0934 |
| SANTA CLARA, CA 95054 |
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