Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/28/1998
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Application #:
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08665300
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Filing Dt:
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06/17/1996
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Inventor:
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TARO OTOTAKE
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Title:
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METHOD AND DEVICE FOR MEASURING PATTERN COORDINATES OF A PATTERN FORMED ON A PATTERN SURFACE OF A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2-3, MARUNOUCHI, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| CUSHMAN DARBY & CUSHMAN, L.L.P. |
| DALE S. LAZAR |
| 1100 NEW YORK AVENUE, N.W. |
| NINTH FLOOR, EAST TOWER |
| WASHINGTON, DC 20005 |
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