Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/03/1998
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Application #:
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08661258
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Filing Dt:
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06/10/1996
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Inventors:
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CHENG-CHUNG HUANG, SHU M. CHEN
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Title:
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AUTOMATED METHOD FOR MONITORING AND CONTROLLING THE ORTHOPHOSPHORIC ACID ETCH RATE OF SILICON NITRIDE INSULATOR LAYERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
121, PARK AVENUE 3 |
HSIN-CHU, TAIWAN ROC |
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GEORGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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