Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/01/1998
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Application #:
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08751486
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Filing Dt:
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11/18/1996
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Inventors:
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KEVIN FAIRBAIRN, HARI K. PONNEKANTI, DAVID CHEUNG, TSUTOMU TANAKA, MUKUL KELKAR
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Title:
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REMOTE PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| B. TODD PATTERSON |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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