Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08868061
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Filing Dt:
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06/03/1997
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Inventors:
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NALLAN C. PADMAPANI, TERRY KO
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Title:
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SELECTIVE PLASMA ETCHING OF SILICON NITRIDE IN PRESENCE OF SILICON OR SILLICON OXIDES USING MIXTURE OF NH 3 OR SF 6 AND HBR AND N 2
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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FLIESLER, DUBB, MEYER & LOVEJOY LLP |
GIDEON GIMLAN |
FOUR EMBARCADERO CENTER, STE. 400 |
SAN FRANCISCO, CA 94111 |
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