Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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08947945
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Filing Dt:
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10/09/1997
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Inventors:
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ZAKARYAE FATHI, DENISE A. TUCKER, RICHARD S. GARARD, JIANGHUA WEI
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Title:
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CURING POLYMER LAYERS ON SEMICONDUCTOR SUBSTRATES USING VARIABLE FREQUENCY MICROWAVE ENERGY
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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MOSER TABOADA/ALAN TABOADA |
1030 BROAD STREET |
SUITE 203 |
SHREWSBURY, NJ 07702 |
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