Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
07/20/1999
|
Application #:
|
08492887
|
Filing Dt:
|
06/20/1995
|
|
Inventors:
|
KATSUYA WATANABE, TAKASHI SATO, ERI HAIKATAK
|
|
Title:
|
MICROWAVE PLASMA PROCESSING METHOD FOR PREVENTING THE PRODUCTION OF ETCH RESIDUE
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| CHIYODA-KU |
| 6-KANDA SURUGADAI 4-CHOME |
| TOKYO, JAPAN |
|
|
|
|
| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| ALAN E. SCHIAVELLI |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VIRGINIA 22209 |
|
|
Search Results as of:
05/04/2024 11:27 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
