Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/1999
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Application #:
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08960150
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Filing Dt:
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10/24/1997
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Inventors:
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WERNER BLERCH, PETER GRUEWALD, MICHAEL MAURER, HELMUT MERKLE, THOMAS THEILER
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Title:
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RAPID THERMAL PROCESSING (RTP) SYSTEM WITH ROTATING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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BENZSTR. 1 |
85551 KIRCHHEIM, GERMANY |
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RODNEY T. HODGSON |
822 PINESBRIDGE RD. |
OSSINING, NY 10562 |
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