Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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09069376
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Filing Dt:
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04/28/1998
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Inventors:
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I PING LEE, ERIK S. JENG
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Title:
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METHOD OF DRY ETCHING A1CU USING SIN HARD MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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123, PARK AVE. - 3RD, SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN |
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GOERGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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