Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/16/1999
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Application #:
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09259928
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Filing Dt:
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03/01/1999
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Inventors:
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HARRY LEVINSON, KHANH B. NGUYEN, ANNA M. MINVIELLE
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Title:
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METHOD OF CHARACTERIZING LINEWIDTH ERRORS IN A SCANNING LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 3453 |
| ONE AMD PLACE |
| SUNNYVALE, CALIFORNIA 94088 |
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| RENNER, OTTO, BOISSELLE & SKLAR, P.L.L. |
| CYNTHIA S. MURPHY |
| 1621 EUCLID AVE. |
| 19TH FLOOR |
| CLEVELAND, OH 44115 |
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