Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/04/2000
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Application #:
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08891410
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Filing Dt:
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07/09/1997
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Inventors:
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YAN YE, DIANA MA, GERALD YIN
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Title:
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PATTERNED COPPER ETCH FOR MICRON AND SUBMICRON FEATURES, USING ENHANCED PHYSICAL BOMBARDMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| SHIRLEY L. CHURCH, ESQ. |
| PATENT COUNSEL |
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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