Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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08948279
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Filing Dt:
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10/09/1997
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Inventors:
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KAM S. LAW, ROBERT M. ROBERTSON, QUANYUAN SHANG, JEFF OLSEN, CARL SORENSEN
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Title:
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DUAL FREQUENCY EXCITATION OF PLASMA FOR FILM DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 1, 7 BAN 20CHOME, NISHISHINJUKU |
| TOKYO, JAPAN |
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| APPLIED MATERIALS, INC. |
| BAO Q. TRAN |
| PATENT COUNSEL, LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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