Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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09200389
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Filing Dt:
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11/24/1998
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Inventors:
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KEVIN P. MARTIN, HARRY P. GILLIS, DMITRI A. CHOUTOV
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Title:
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METHOD AND APPARATUS FOR LOW ENERGY ELECTRON ENHANCED ETCHING OF SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 TENTH STREET |
| ATLANTA, GEORGIA 30332 |
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| THOMAS, KAYDEN, HORSTEMEYER & RISLEY LLP |
| SCOTT A. HORSTEMEYER |
| 100 GALLERIA PARKWAY, SUITE 1500 |
| ATLANTA, GEORGIA 30339-5948 |
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