Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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08969201
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Filing Dt:
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11/12/1997
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Inventors:
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AKINORI MATSUMOTO, TAKESHI KURODA, COZY BAN, TOKO KONISHI, NAOKI YOKOI
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Title:
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DRYING APPARATUS AND METHOD USING IPA OF A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, 100, JAPAN |
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| 1 MIZUHARA 4-CHOME, ITAMI-SHI |
| HYOGO 664, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL |
| C. IRVIN MCCLELLAND |
| ATTORNEYS AT LAW, FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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