Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2000
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Application #:
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08984225
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Filing Dt:
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12/03/1997
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Inventors:
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KEVIN P MARTIN, HARRY P GILLIS, DMITRI A CHOUTOV
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Title:
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METHOD AND APPARATUS FOR LOW ENERGY ELECTRON ENHANCED ETCHING AND CLEANING OF SUBSTRATES IN THE POSITIVE COLUMN OF A PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CENTENNIAL RESEARCH BUILDING |
| 400 TENTH STREET |
| ATLANTA, GEORGIA 30332 |
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| THOMAS, KAYDEN, HORSTEMEYER ET AL. |
| SCOTT A. HORSTMEYER |
| 100 GALLERIA PARKWAY, STE. 1500 |
| ATLANTA, GA 30339 |
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