Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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08811627
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Filing Dt:
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03/05/1997
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Inventors:
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TSUTOMU TANAKA, MUKUL KELKAR, KEVIN FAIRBAIRN, HARI PONNEKANTI, DAVID CHEUNG
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Title:
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APPARATUS AND METHODS FOR UPGRADED SUBSTRATE PROCESSING SYSTEM WITH MICROWAVE PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROSA S. KIM |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CA 95052 |
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