Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/04/2000
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Application #:
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08474136
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Filing Dt:
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06/07/1995
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Inventors:
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TETSUNORI KAJI, TAKASHI FUJII, MOTOHIKO YOSHIGAI, YOSHINAO KAWASAKI, MASAHARU NISHIUMI
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Title:
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PLASMA PROCESSING APPARATUS HAVING INSULATOR DISPOSED ON INNER SURFACE OF PLASMA GENERATING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODDA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET, STE. 1800 |
| VIRGINIA, VA 22209 |
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