Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/25/2000
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Application #:
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09324689
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Filing Dt:
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06/03/1999
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Inventors:
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CHAMPION YI, JEN-CHIEH TUNG, JIUN-FANG WANG
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Title:
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STABILIZATION OF SLURRY USED IN CHEMICAL MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS BY MEGASONIC PULSE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 19, L-HSIN ROAD |
| HSINCHU, TAIWAN R.O.C |
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| BLAKELY SOKOLOFF TAYLOR ET AL |
| CHUN M. NG |
| 12400 WILSHIRE BLVD. |
| 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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