Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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09132698
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Filing Dt:
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08/12/1998
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Inventors:
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TAKAMASA SATOH, SOICHIRO ARAI, KENICHI MIYAZAWA, YOSHIHISA OOAEH, JUNICHI KAI et al
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Title:
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METHOD OF AND SYSTEM FOR EXPOSING PATTERN ON OBJECT BY CHARGED PARTICLE BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7-1, NISHI-SHINJUKU 2-CHOME |
SHINJUKU-KU, TOKYO 163-0722, JAPAN |
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STAAS & HALSEY LLP |
ATTENTION: H. J. STAAS |
1201 NEW YORK AVE., N.W., 7TH FLOOR |
WASHINGTON, D.C. 20005 |
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