Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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09389432
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Filing Dt:
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09/03/1999
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Inventors:
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SE-HYEONG LEE, JONG-HEUI SONG, MIN-WOONG CHOI
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Title:
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PLASMA ETCHING APPARATUS HAVING A SEALING MEMBER COUPLING AN UPPER ELECTRODE TO AN ETCHING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| MYERS BIGEL SIBLEY & SAJOVEC |
| GRANT J. SCOTT |
| P.O. BOX 37428 |
| RALEIGH, NORTH CAROLINA 27627 |
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