Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2000
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Application #:
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08887165
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Filing Dt:
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07/02/1997
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Inventors:
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SUDHAKAR SUBRAHMANYAM, TSUTOMU TANAKA, MUKUL KELKAR
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Title:
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METHOD AND APPARATUS FOR DETERMINING THE ENDPOINT IN A PLASMA CLEANING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| TOWNSEND AND TOWNSEND AND CREW LLP |
| WILLIAM L. SHAFFER |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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